Within this paper, the new lapping slurry and sprucing slurry are released. And also the deliquescence diploma of CLBO is fallen to cheapest. A brand new Doing the job technological innovation is additionally adopted. Just after rough sharpening, the focus of extremely-precision sharpening slurry is enhanced adequately. So does the extremely-precision sprucing speed, and the wiping velocity is quicker compared to the deliquescence speed. The CLBO crystal floor roughness can attain 1nm and preserve the surface area good quality well. Entry through your establishment
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The standard ability of your NIR laser still has the opportunity to generally be enhanced to tens of watts including 70 W [26] When the double-go configuration could possibly be used to the Yb:YAG SCF amplifier stage. Consequently, if the conversion effectiveness of 31% from NIR to DUV could be even now managed at this better electrical power affliction, the standard output electricity of the DUV laser at 258 nm may very well be greater than 20 W, which would certainly be a exceptional electric power degree to the DUV laser and bring about the unanticipated DUV laser machining final results. Moreover, for high-ability DUV laser, the UV harm of the nonlinear crystal, such as the windows for CLBO crystal along with the mirrors, is another essential parameter for long term and secure operation.
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Both of those the 1040 nm and 1078 nm laser originate from just one dual-wavelength Yb-doped fiber laser. Every laser is amplified by stages of fiber amplifier and Yb-doped resources amplifier, respectively.
On the other facet, the ability scaling of your NIR laser is an additional component to raise the average electric power with the 193-nm DUV laser. As a result of not enough the large-electric power amplification Answer on the NIR laser (such as at 1553 nm), nonlinear frequency procedures like optical parameter oscillation (OPO) may very well be applied to produce a wavelength converter by shifting the wavelength from one μm to the specified wavelength in addition to acquiring relative greater ability [21]. Lately, a diamond Raman laser confirmed its capability in achieving a significant power plus a large conversion performance on the 1st Stokes of the 1-μm laser [22,23], which suggests the chance to generally be utilized during the 193-nm DUV laser technology as a result of its significant Raman get and large frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics from the Nd:YAG fundamental laser wavelength. In order to enhance the destruction threshold, very low CLBO surface area roughness, by ultra-precision machining, is necessary. Since the CLBO crystal has quick hydroscopic reaction and micro scratches in machining, extremely-exact machining of the CLBO crystal is often a tricky technical challenge.
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Its UV absorption edge reaches a hundred and eighty nm. The productive nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as huge as that of KDP. CLBO crystals could be grown within the stoichiometric melt with reduce viscosity.
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